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公开(公告)号：US20220194804A1
公开(公告)日：2022-06-23
申请号：US17550740
申请日：2021-12-14
Applicant: ENTEGRIS, INC.
Inventor： Oleg Byl , Diego Troya , Nathan B. Jones , John R. Morris
Abstract: Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.
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