公开(公告)号：US20230235856A1

公开(公告)日：2023-07-27

申请号：US18102259

申请日：2023-01-27

Applicant: ENTEGRIS, INC.

Inventor： Oleg Byl ,  John Robert Morris ,  Nathan Ballard Jones ,  Diego Troya

IPC: F17C11/00 ,  C01B6/10 ,  C01B32/20 ,  B01J20/20 ,  F17C5/00

CPC classification number: F17C11/00 ,  C01B6/10 ,  C01B32/20 ,  B01J20/20 ,  F17C5/00 ,  C01P2002/78 ,  F17C2221/01 ,  F17C2205/0323 ,  F17C2270/0518

Abstract: Described are systems and methods of storing adsorbing diborane on carbon adsorption medium.

公开(公告)号：US12140272B2

公开(公告)日：2024-11-12

申请号：US18102259

申请日：2023-01-27

Applicant: ENTEGRIS, INC.

Inventor： Oleg Byl ,  John Robert Morris ,  Nathan Ballard Jones ,  Diego Troya

IPC: F17C11/00 ,  B01J20/20 ,  C01B6/10 ,  C01B32/20 ,  F17C5/00

Abstract: Described are systems and methods of storing adsorbing diborane on carbon adsorption medium. The invention discloses a vessel for storing diborane. The vessel includes: a vessel interior; microporous carbon adsorbent in the vessel interior; diborane in the vessel interior at least partially adsorbed on the microporous adsorbent. The microporous adsorbent includes slit pores between graphite layers at a graphite layer spacing that increases an activation energy required for diborane degradation relative to an activation energy of degradation of non-adsorbed gaseous diborane at ambient pressure, and at the same temperature.