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    Electronic circuit for measuring rotational speed in a MEMS gyroscope and method for actuating the circuit
    4.
    发明授权
    Electronic circuit for measuring rotational speed in a MEMS gyroscope and method for actuating the circuit 有权
    用于测量MEMS陀螺仪中的转速的电子电路和用于致动电路的方法

    公开(公告)号：US09528831B2

    公开(公告)日：2016-12-27

    申请号：US14552891

    申请日：2014-11-25

    Applicant: EM Microelectronic-Marin SA

    Inventor： Christophe Entringer ,  Alexandre Deschildre ,  Sylvain Grosjean

    IPC: G01C19/5776 ,  G01C19/567

    CPC classification number: G01C19/567 ,  G01C19/5776

    Abstract: The electronic circuit measures angular speed in a gyroscope, which includes a mass connected to a spring and a damping element, an actuation capacitor for actuating the mass and a detection capacitor for detecting motion of the mass. The electronic circuit includes a measurement resistor, which is connected to the moving mass and has a variation in resistive value equal to the oscillation frequency of the mass. The resistor is polarized to supply a measurement signal, which includes a carrier signal in phase with the oscillation of the mass and an angular speed signal phase shifted by π/2 relative to the carrier signal The measurement signal is supplied to an integration unit clocked by a clocking signal phase shifted by π/2 relative to the carrier signal and originating from the drive circuit. The angular speed signal is demodulated at the integration unit output.

    Abstract translation: 电子电路测量陀螺仪中的角速度，其包括连接到弹簧和阻尼元件的质量，用于致动质量的致动电容器和用于检测质量块的运动的检测电容器。 电子电路包括测量电阻，其连接到移动质量块，并具有等于质量的振荡频率的电阻值的变化。 电阻器被极化以提供测量信号，其包括与质量的振荡同相的载波信号和相对于载波信号偏移π/ 2的角速度信号相位。测量信号被提供给由时钟由 时钟信号相位相对于载波信号移位π/ 2并源自驱动电路。 角速度信号在积分单元输出处被解调。

    Method of measuring a physical parameter and electronic interface circuit for a capacitive sensor for implementing the same
    5.
    发明授权
    Method of measuring a physical parameter and electronic interface circuit for a capacitive sensor for implementing the same 有权
    测量电容传感器的物理参数和电子接口电路的实现方法

    公开(公告)号：US09075094B2

    公开(公告)日：2015-07-07

    申请号：US13733374

    申请日：2013-01-03

    Applicant: EM MICROELECTRONIC-MARIN SA

    Inventor： Christophe Entringer ,  Sylvain Grosjean

    IPC: G01R27/26 ,  G01P15/125 ,  G01L5/16 ,  G01D5/24

    CPC classification number: G01R27/2605 ,  G01D5/24 ,  G01L5/165 ,  G01P15/125

    Abstract: The method is for measuring a physical parameter by an electronic circuit connected to a two differential capacitor sensor having two fixed electrodes and a common moving electrode. The electronic circuit supplies first and second digital measuring signals. Each measuring cycle consists on biasing the electrodes by the measuring voltage based on the first digital signal, connecting the fixed electrodes to a supply voltage source for a first biasing, biasing the electrodes by the measuring voltage based on the second digital measuring signal, and inversely connecting the fixed electrodes to a supply voltage source for a second biasing. In first successive measuring cycles, the first and second digital signals are adapted to each cycle by a large step value. In second successive measuring cycles, the first and second digital signals are adapted to each cycle by a small step value until the end of the conversion.

    Abstract translation: 该方法用于通过连接到具有两个固定电极和公共移动电极的两个差分电容器传感器的电子电路来测量物理参数。 电子电路提供第一和第二数字测量信号。 每个测量周期包括通过基于第一数字信号的测量电压偏置电极，将固定电极连接到用于第一偏置的电源电压源，基于第二数字测量信号将电极偏置测量电压，并且反向 将固定电极连接到用于第二偏置的电源电压源。 在第一连续测量循环中，第一和第二数字信号通过大的步进值适应于每个循环。 在第二个连续的测量循环中，第一和第二数字信号通过一个小的步长值适应每个周期，直到转换结束。

    Capacitive accelerometer
    8.
    发明授权
    Capacitive accelerometer 有权

    公开(公告)号：US10564176B2

    公开(公告)日：2020-02-18

    申请号：US15805232

    申请日：2017-11-07

    Applicant: EM Microelectronic-Marin SA

    Inventor： Sylvain Grosjean ,  Yonghong Tao ,  Jean-Michel Daga

    IPC: G01P15/125 ,  G01P15/13 ,  G01P15/18 ,  G01P21/00

    Abstract: A capacitive accelerometer for measuring an acceleration value is provided, including a first and a second electrode; a third mobile electrode arranged therebetween, and forming with the first electrode a first capacitor, and with the second electrode a second capacitor, the third electrode being displaced when the accelerometer is subject to acceleration and generates a capacitance difference value transformable to electrical charges; a first and a second voltage source configured to selectively apply first and second voltages to the first and the second electrodes, respectively, and a third voltage to the third electrode, and to generate electrostatic forces acting on the third electrode, the first, second and/or third voltages applied during electrical charge transfers for collecting the electrical charges to measure the acceleration; and an electrostatic force compensator to compensate for missing electrostatic forces due to a modified charge transfer rate, a compensation amount dependent on the modified rate.

    ELECTRONIC DEVICE FOR MEASURING A PHYSICAL PARAMETER
    9.
    发明申请
    ELECTRONIC DEVICE FOR MEASURING A PHYSICAL PARAMETER 审中-公开

    公开(公告)号：US20190178909A1

    公开(公告)日：2019-06-13

    申请号：US16210005

    申请日：2018-12-05

    Applicant: EM Microelectronic-Marin SA

    Inventor： Sylvain Grosjean ,  Yonghong Tao ,  Alexandre Deschildre ,  Hugues Blangy

    IPC: G01P15/125 ,  G01P15/08 ,  G01D5/24

    Abstract: An electronic measuring device for measuring a physical parameter includes a differential analogue sensor formed from two capacitances—an excitation circuit of the differential analogue sensor providing to the sensor two electrical excitation signals which are inverted—a measuring circuit which generates an analogue electrical voltage which is a function determined from the value of the sensor, and a circuit for compensating for a possible offset of the sensor, which is formed from a compensation capacitance, which is excited by its own electrical excitation signal. The excitation circuit is arranged in order to be able to provide to an additional capacitance of the compensation circuit its own electrical excitation signal having a linear dependence on the absolute temperature with a determined proportionality factor in order to compensate for a drift in temperature of an electrical assembly of the measuring device comprising at least the compensation capacitance.

    Method for sensing a displacement of a pointing device
    10.
    发明授权
    Method for sensing a displacement of a pointing device 有权

    公开(公告)号：US12147611B2

    公开(公告)日：2024-11-19

    申请号：US18257175

    申请日：2021-12-14

    Applicant: EM Microelectronic-Marin SA

    Inventor： Sylvain Grosjean ,  Jérémy Schlachter

    IPC: G06F3/03

    Abstract: In a method for sensing a displacement of a pointing device, like a mouse, said pointing device includes at least one light source configured to illuminate a surface, at least one first secondary photodetector, at least one second secondary photodetector, and at least one primary photodetector. Each individual value of the photodetectors is weighted and compared such as to sense said displacement of the pointing device.

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