公开(公告)号：US10551244B2

公开(公告)日：2020-02-04

申请号：US16135908

申请日：2018-09-19

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Wook-Jae Lee ,  Jung Jin Ju

IPC: G01J1/04 ,  G02B6/122 ,  G02B6/12 ,  G01J1/44 ,  G01J1/42 ,  G01J1/02 ,  B82Y15/00 ,  H01L39/10 ,  B82Y20/00 ,  H01L31/101

Abstract: Provided is a photon detector. The photon detector includes an optical waveguide including input and detection regions, which are spaced apart from each other in a first direction, and a conversion region between the input region and the detection region, a nano pattern disposed on the optical waveguide in the conversion region, and a nanowire disposed on the optical waveguide in the detection region. The nano pattern includes a first pattern and a second pattern, which extend in the first direction, and the first pattern and the second pattern are spaced apart from each other in a second direction crossing the first direction.