公开(公告)号：US20240110883A1

公开(公告)日：2024-04-04

申请号：US18464772

申请日：2023-09-11

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Seungeon MOON ,  JEONG HUN KIM ,  Jong Pil IM

IPC: G01N27/12

CPC classification number: G01N27/125

Abstract: Disclosed are a MEMS gas sensor and a manufacturing method thereof. The MEMS gas sensor includes a substrate having a recess, a membrane disposed in the recess and having a through-hole configured to expose a portion of a top surface of the substrate, which is disposed at a central portion of the recess, sensing electrodes disposed in the membrane, and a sensing layer disposed on each of bottom and top surfaces of the membrane and disposed in the through-hole.