公开(公告)号：US20170241853A1

公开(公告)日：2017-08-24

申请号：US15234911

申请日：2016-08-11

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Chang Han JE ,  Woo Seok YANG ,  Sung Q LEE ,  Chang Auck CHOI

IPC: G01L9/00

CPC classification number: G01L9/0054 ,  G01L9/0045

Abstract: Provided is a pressure sensor including a substrate having a cavity therein, a partition wall disposed in the substrate to surround the cavity, a substrate insulation layer disposed on the top surface of the substrate to cover the cavity, a sensing unit disposed on the substrate insulation layer, and an encapsulation layer disposed on the substrate insulation layer to cover the sensing unit. The cavity may extend from a top surface toward a bottom surface of the substrate, the partition wall may have an inner sidewall exposed by the cavity, and at least a portion of the sensing unit may overlap the cavity when viewed in a plan view.