公开(公告)号：US20140083456A1

公开(公告)日：2014-03-27

申请号：US13627358

申请日：2012-09-26

申请人： Corning Incorporated

发明人： Mitchell Jerome Ramsey ,  Siva Venkatachalam ,  Liming Wang

IPC分类号： B08B7/04 ,  B08B7/02 ,  B08B3/04 ,  B08B1/02

CPC分类号： B08B7/04 ,  B08B1/02 ,  B08B3/02 ,  B08B3/04 ,  B08B7/026

摘要： Disclosed herein are methods and apparatuses for cleaning at least one edge of a substrate. Exemplary methods and apparatuses include a cleaning system comprising (a) a plurality of fluid channels, (b) a plurality of brushes, (c) at least one nozzle, and (d) at least one vibration generator. The brushes may comprise a plurality of bristles and/or nodules and may be connected to at least one of the fluid channels such that fluid flows through the bristles and/or nodules to the substrate edge. At least one vibration generator may be connected to the cleaning system and configured to deliver sonic energy to the plurality of brushes.

摘要翻译： 本文公开了用于清洁基底的至少一个边缘的方法和装置。 示例性方法和装置包括清洁系统，其包括（a）多个流体通道，（b）多个刷子，（c）至少一个喷嘴，和（d）至少一个振动发生器。 刷可以包括多个刷毛和/或结节，并且可以连接到至少一个流体通道，使得流体流过刷毛和/或结节到基底边缘。 至少一个振动发生器可以连接到清洁系统并且被配置成将声能传送到多个刷子。