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公开(公告)号:US20030222015A1
公开(公告)日:2003-12-04
申请号:US10162058
申请日:2002-06-04
Inventor: Shigeo Ted Oyama , Lixiong Zang , Doohwan Lee , Doug S. Jack
IPC: B01D069/10
CPC classification number: B01D67/0072 , B01D53/228 , B01D69/10 , B01D69/12 , B01D71/02 , B01D71/024 , B01D71/025 , B01D71/027 , B01D71/028 , B01D2325/022 , B01D2325/22 , C01B3/503 , C01B2203/041 , C01B2203/0465 , C01B2203/047 , C01B2203/0475 , C01B2203/048 , C01B2203/0485 , C01B2203/0495
Abstract: A hydrogen permselective membrane, a method of forming a permselective membrane and an apparatus comprising a permselective membrane, a porous substrate and an optional intermediate layer are described. Using chemical vapor deposition (CVD) at low reactant gas concentration, high permselectivities are achieved with minimal reduction in hydrogen permeance.
Abstract translation: 描述了氢选择性选择膜,形成选择渗透膜的方法以及包括选择渗透膜,多孔基材和任选的中间层的装置。 在低反应物气体浓度下使用化学气相沉积(CVD),实现了高渗透率,同时氢渗透性降低最小。