公开(公告)号：US10450189B2

公开(公告)日：2019-10-22

申请号：US15810592

申请日：2017-11-13

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Tom Hanley ,  Timothy John Brosnihan ,  Euan James Boyd

IPC: B81B3/00 ,  B81C1/00 ,  H04R9/08 ,  H04R19/04 ,  H04R19/00 ,  H04R31/00

Abstract: The application describes a MEMS transducer comprising a substrate having a cavity. The transducer exhibits a membrane layer supported relative to the substrate to define a flexible membrane. An upper surface of the substrate comprises an overlap region between the edge of the cavity and a perimeter of the flexible membrane where the membrane overlies the upper surface of the substrate. At least one portion of the overlap region of the upper surface of the substrate is provided with a plurality of recesses. The recesses are defined so as to extend from the edge of the cavity towards the perimeter of the flexible membrane.