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公开(公告)号：US10343894B2
公开(公告)日：2019-07-09
申请号：US15676430
申请日：2017-08-14
Inventor： Stephen Duffy , Colin Robert Jenkins , Tsjerk Hans Hoekstra
Abstract: The application describes a MEMS transducer comprising a layer of conductive material provided on a surface of a layer of membrane material. The layer of conductive material comprises first and second regions, wherein the thickness and/or the conductivity of the/each first and second regions is different.
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