公开(公告)号：US20200025559A1

公开(公告)日：2020-01-23

申请号：US16514956

申请日：2019-07-17

申请人： Carl Zeiss Industrielle Messtechnik GmbH

发明人： Andreas Betsche ,  Dirk Beckmann

IPC分类号： G01B11/25 ,  G01S7/481 ,  G01S17/89 ,  G01B11/14

摘要： An apparatus and method for capturing an object surface by electromagnetic radiation are provided. The apparatus includes a radiation generation device having a beam source and being configured to radiate a first and a second electromagnetic radiation having a first and second wavelength, respectively, onto a measurement point or a region of the object surface without emitting radiation onto the measurement point or onto the region, or without emitting radiation utilized for surface capturing, in a wavelength range between the first and the second wavelengths, a capturing device to capture for the measurement point a first and a second measurement value, the first measurement value being based on reflected radiation having the first wavelength and the second measurement value being based on reflected radiation having the second wavelength, and each of the first and second measurement values representing a distance between the capturing device and the object surface.

公开(公告)号：US12055384B2

公开(公告)日：2024-08-06

申请号：US16514956

申请日：2019-07-17

申请人： Carl Zeiss Industrielle Messtechnik GmbH

发明人： Andreas Betsche ,  Dirk Beckmann

IPC分类号： G01B11/25 ,  G01B11/14 ,  G01B11/22 ,  G01S7/481 ,  G01S17/89

CPC分类号： G01B11/2518 ,  G01B11/14 ,  G01B11/22 ,  G01S7/4817 ,  G01S17/89

摘要： An apparatus and method for capturing an object surface by electromagnetic radiation are provided. The apparatus includes a radiation generation device having a beam source and being configured to radiate a first and a second electromagnetic radiation having a first and second wavelength, respectively, onto a measurement point or a region of the object surface without emitting radiation onto the measurement point or onto the region, or without emitting radiation utilized for surface capturing, in a wavelength range between the first and the second wavelengths, a capturing device to capture for the measurement point a first and a second measurement value, the first measurement value being based on reflected radiation having the first wavelength and the second measurement value being based on reflected radiation having the second wavelength, and each of the first and second measurement values representing a distance between the capturing device and the object surface.