公开(公告)号：US20210384010A1

公开(公告)日：2021-12-09

申请号：US17155885

申请日：2021-01-22

Applicant: CORNING INCORPORATED

Inventor： Carl William Almgren ,  Daniel Robert Boughton ,  Kenneth Edward Hrdina ,  Stefan Wolfgang Kramel ,  Christopher Scott Thomas

IPC: H01J37/32 ,  H03H7/38

Abstract: A system, having: an RF power source; an RF matching network electrically coupled to the RF power source; an impedance matching circuit electrically coupled to the RF matching network, wherein the impedance matching circuit has a first adjustable capacitor connected in series with the RF matching network and a second adjustable capacitor connected in parallel with the first capacitor; and an inductive process load electrically coupled to the impedance matching circuit.

公开(公告)号：US11621147B2

公开(公告)日：2023-04-04

申请号：US17155885

申请日：2021-01-22

Applicant: CORNING INCORPORATED

Inventor： Carl William Almgren ,  Daniel Robert Boughton ,  Kenneth Edward Hrdina ,  Stefan Wolfgang Kramel ,  Christopher Scott Thomas

IPC: H01J37/32 ,  H03H7/38

Abstract: A system, having: an RF power source; an RF matching network electrically coupled to the RF power source; an impedance matching circuit electrically coupled to the RF matching network, wherein the impedance matching circuit has a first adjustable capacitor connected in series with the RF matching network and a second adjustable capacitor connected in parallel with the first capacitor; and an inductive process load electrically coupled to the impedance matching circuit.