公开(公告)号：US20130042686A1

公开(公告)日：2013-02-21

申请号：US13211361

申请日：2011-08-17

Applicant: CHIUNG-WEN LIN ,  HUAN-HSIANG WENG ,  CHIA YU WU

Inventor： CHIUNG-WEN LIN ,  HUAN-HSIANG WENG ,  CHIA YU WU

IPC: G01P15/125 ,  G01P15/00

CPC classification number: G01C19/5733 ,  G01C19/5783 ,  G01C21/16 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/084 ,  G01P2015/0845 ,  G01P2015/0848

Abstract: The invention relates to an inertia sensing apparatus, comprising a substrate, a first and second inertia sensing elements. The first inertia sensing element is connected to a substrate and has a containment space. The second inertia sensing element is connected to the substrate and is disposed in the containment space of the first inertia sensing element, wherein the first inertia sensing element and the second sensing element are connected to the substrate, and the first inertia sensing element and the second sensing element are not connected to each other, the first inertia sensing element and the second sensing element individually and independently detect at least one inertia motion of the inertia sensing apparatus. Therefore, the invention is based on the second inertia sensing element disposed in the containment space of the first inertia sensing element and they individually and independently detect at least one inertia motion of the inertia sensing apparatus, so as to decrease an area of the inertia sensing apparatus, thus reducing the chip size and prevent the two inertia sensing elements from coupling to result in decreasing the sensing precision.

Abstract translation: 本发明涉及一种惯性感测装置，包括基板，第一和第二惯性传感元件。 第一惯性感测元件连接到基板并具有容纳空间。 第二惯性感测元件连接到基板并且设置在第一惯性感测元件的容纳空间中，其中第一惯性感测元件和第二感测元件连接到基板，第一惯性感测元件和第二惯性感测元件 感测元件彼此不连接，第一惯性感测元件和第二感测元件独立且独立地检测惯性感测设备的至少一个惯性运动。 因此，本发明基于设置在第一惯性传感元件的容纳空间中的第二惯性感测元件，并且它们独立且独立地检测惯性感测装置的至少一个惯性运动，以便减小惯性感测的面积 装置，从而减小了芯片尺寸并防止了两个惯性感测元件的耦合，从而导致传感精度的降低。