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公开(公告)号：US20190337025A1
公开(公告)日：2019-11-07
申请号：US16516842
申请日：2019-07-19
申请人： Bruker Nano, Inc.
发明人： Tod Evan Robinson , Bernabe Arruza , Kenneth Gilbert Roessler , David Brinkley , Jeffrey E. LeClaire
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
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公开(公告)号：US20230158555A1
公开(公告)日：2023-05-25
申请号：US18093968
申请日：2023-01-06
申请人： Bruker Nano, Inc.
发明人： Tod Evan Robinson , Bernabe Arruza , Kenneth Gilbert Roessler , David Brinkley , Jeffrey E. LeClaire
CPC分类号： B08B7/0028 , B08B1/00 , B08B1/001 , G03F1/82 , G03F1/84 , G03F7/0002 , G03F7/70925 , G01Q20/02
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
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公开(公告)号：US20210308724A1
公开(公告)日：2021-10-07
申请号：US17348217
申请日：2021-06-15
申请人： Bruker Nano, Inc.
发明人： Tod Evan Robinson , Bernabe Arruza , Kenneth Gilbert Roessler , David Brinkley , Jeffrey E. LeClaire
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
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公开(公告)号：US11964310B2
公开(公告)日：2024-04-23
申请号：US18093968
申请日：2023-01-06
申请人： Bruker Nano, Inc.
发明人： Tod Evan Robinson , Bernabe Arruza , Kenneth Gilbert Roessler , David Brinkley , Jeffrey E. LeClaire
IPC分类号： B08B7/00 , B08B1/00 , G03F1/82 , G03F1/84 , G03F7/00 , G03F7/20 , G01Q20/02 , G01Q60/42 , G01Q70/12 , G01Q80/00
CPC分类号： B08B7/0028 , B08B1/00 , B08B1/001 , G03F1/82 , G03F1/84 , G03F7/0002 , G03F7/70925 , G01Q20/02 , G01Q60/42 , G01Q70/12 , G01Q80/00
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
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公开(公告)号：US11577286B2
公开(公告)日：2023-02-14
申请号：US17348217
申请日：2021-06-15
申请人： Bruker Nano, Inc.
发明人： Tod Evan Robinson , Bernabe Arruza , Kenneth Gilbert Roessler , David Brinkley , Jeffrey E. LeClaire
IPC分类号： B08B7/00 , B08B1/00 , G03F1/82 , G03F1/84 , G03F7/00 , G03F7/20 , G01Q20/02 , G01Q60/42 , G01Q70/12 , G01Q80/00
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
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公开(公告)号：US11040379B2
公开(公告)日：2021-06-22
申请号：US16516842
申请日：2019-07-19
申请人： Bruker Nano, Inc.
发明人： Tod Evan Robinson , Bernabe Arruza , Kenneth Gilbert Roessler , David Brinkley , Jeffrey E. LeClaire
IPC分类号： B08B7/00 , B08B1/00 , G03F1/82 , G03F1/84 , G03F7/00 , G03F7/20 , G01Q20/02 , G01Q60/42 , G01Q70/12 , G01Q80/00
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
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