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公开(公告)号：US06965662B2
公开(公告)日：2005-11-15
申请号：US10321749
申请日：2002-12-17
申请人： Barry Eppler , Ronald K Kerschner
发明人： Barry Eppler , Ronald K Kerschner
CPC分类号： G01N23/04 , H01J35/08 , H01J2235/186
摘要： An x-ray laminography imaging system that utilizes a nonplanar anode target to enable objects that are oblique to the direction of projection of electron beams onto the target to be precisely imaged. Because many objects that laminography techniques are used to inspect are oblique or have portions that are oblique, the nonplanar anode target of the present invention enables enables spot patterns to be traced that are parallel to the plane of the object, regardless of whether it is oblique or orthogonal.
摘要翻译： 利用非平面阳极靶的X射线层析成像系统使得能够使电子束投射到靶上的方向倾斜的物体被精确地成像。 由于用于检查的层析技术的许多对象是倾斜的或具有倾斜的部分，所以本发明的非平面阳极靶使得能够跟踪平行于物体平面的斑点图案，而不管其是否是倾斜的 或正交。
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2.发明授权Image-based inspection system including positioning compensation for non-planar targets 失效基于图像的检测系统，包括非平面目标的定位补偿公开(公告)号：US06628746B2
公开(公告)日：2003-09-30
申请号：US10021383
申请日：2001-10-30
IPC分类号： A61B600
CPC分类号： G03F7/70616 , G01N21/956 , G01N23/04
摘要： A image-based system for inspecting objects utilizes an imaging chain that defines a focal plane, a manipulator for translating and rotating either the object under inspection or the imaging chain, a surface mapping system that generates a representation of the surface of the object under inspection, and a controller that uses the representation of the surface of the object to control the manipulator so that a portion of the object under inspection lies within the focal plane of the imaging chain.
摘要翻译： 用于检查对象的基于图像的系统利用定义焦平面的成像链，用于平移和旋转被检查对象或成像链的操纵器，生成检查对象表面的表示的表面映射系统 以及控制器，其使用对象的表面的表示来控制操纵器，使得被检查对象的一部分位于成像链的焦平面内。
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3.发明授权X-ray laminography system having a pitch, roll and Z-motion positioning system 失效具有俯仰，滚动和Z运动定位系统的X射线层析系统公开(公告)号：US06977985B2
公开(公告)日：2005-12-20
申请号：US10321255
申请日：2002-12-17
申请人： David D Bohn , Donald R Nohavec , Barry Eppler
发明人： David D Bohn , Donald R Nohavec , Barry Eppler
CPC分类号： G01N23/04
摘要： An x-ray laminography imaging system and a positioning system to be used therewith. The positioning system is configured to move the object in the X, Y and Z-directions (i.e., pitch and roll) to ensure that the object planes of the object that are being imaged are at least substantially parallel to the focal plane of the imaging system. The object is positioned so that object planes associated with the X, Y and Z-coordinates of points along the contour of the surface of the object are at least substantially parallel to the focal plane of the imaging system during imaging of the object plane. Because some objects, such as printed circuit boards, for example, are sometimes warped, by ensuring that the object plane being imaged is at least substantially parallel to the focal plane of the imaging system, precise laminographs are obtained. The preciseness of the laminographs ensures that the cross-sectional slices of the object are accurate, which improves the robustness of an inspection system that uses x-ray laminography to inspect objects.
摘要翻译： 一种x射线层析成像系统和与其一起使用的定位系统。 定位系统被配置为在X，Y和Z方向（即，俯仰和滚动）上移动对象，以确保正被成像的物体的物体平面至少基本上平行于成像的焦平面 系统。 物体被定位成使得与物体表面的轮廓线的点的X，Y和Z坐标相关联的物体平面至少基本平行于物体平面成像期间的成像系统的焦平面。 由于某些物体（例如印刷电路板）有时会翘曲，所以通过确保被成像的物体平面至少基本上平行于成像系统的焦平面，可以获得精确的液晶显示器。 lamingraphs的精确性确保了物体的横截面切片是准确的，这提高了使用x射线层析检查对象的检查系统的鲁棒性。
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公开(公告)号：US06819739B2
公开(公告)日：2004-11-16
申请号：US10306681
申请日：2002-11-27
申请人： Barry Eppler
发明人： Barry Eppler
IPC分类号： G01N2300
摘要： An x-ray laminography imaging system and an apparatus and method for calibrating the system. The x-ray laminography imaging system utilizes a stationary x-ray source and generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector to reduce or eliminate the need to move an object being imaged. The present invention provides an apparatus and a method for calibrating the system based in part on empirical data gathered during physical calibration and in part on data analytically derived from the empirical data. Because calibration of the system can be performed in great part analytically rather than relying entirely on empirically generated data, the calibration process can be performed very quickly.
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