公开(公告)号：US11948845B2

公开(公告)日：2024-04-02

申请号：US17483613

申请日：2021-09-23

Applicant: BOE Technology Group Co., Ltd.

Inventor： Shaodong Sun ,  Haoran Gao ,  Guangcai Yuan ,  Lilei Zhang ,  Wenyue Fu ,  Li Li ,  Hanbo Zheng ,  Shuqi Liu ,  Qi Qi ,  Junwei Yan ,  Pingkuan Gu ,  Lina Jing ,  Yan Chen ,  Yimin Chen

IPC: G01B11/30 ,  H01L21/66 ,  H01L21/02

CPC classification number: H01L22/12 ,  G01B11/306 ,  H01L21/02422

Abstract: The present disclosure relates to a device and a system for testing flatness. The device for testing flatness includes a base, a testing platform, and a ranging sensor. The testing platform is assembled on the base. The testing platform includes a supporting structure. The supporting structure is disposed on the side of the testing platform away from the base and is used to support a to-be-tested board. The structure matches the structure of the to-be-tested board. The ranging sensor is disposed on the side of the testing platform away from the base. After the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2. According to the embodiments of the present disclosure, the flatness of the glass substrate can be tested to improve the manufacturing process to reduce the flatness of the glass substrate, and avoid the problem that the glass substrate is easily broken when entering the subsequent process equipment and the process equipment is down.