IMPRINT TEMPLATE, PREPARATION METHOD THEREOF AND IMPRINT METHOD

    公开(公告)号:US20210165317A1

    公开(公告)日:2021-06-03

    申请号:US16772964

    申请日:2019-10-17

    Inventor: Wei TAN Kang GUO Xin GU

    Abstract: The present disclosure provides an imprint template, including: a base substrate, a pattern layer for imprinting and a planarization layer; wherein the planarization layer is located on a surface of the pattern layer facing away from the base substrate, and a surface of the planarization layer facing away from the base substrate is a plane; and the planarization layer and the pattern layer are configured such that under a specific film removing process, the planarization layer is removed while the pattern layer remains. The present disclosure further provides a preparation method of an imprint template, and an imprint method.

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