公开(公告)号：US09632048B2

公开(公告)日：2017-04-25

申请号：US14470902

申请日：2014-08-27

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Shi Shu ,  Bing Sun ,  Bin Zhang ,  Kexin Lu ,  Yue Shi ,  Zhijun Lv

IPC: G01N27/04 ,  G01R27/00

CPC classification number: G01N27/041 ,  G01R27/00 ,  G01R27/04

Abstract: The present disclosure relates to a sheet resistance measuring method, comprising the following steps: connecting at least one to-be-measured thin film having a predetermined shape to two separate electrodes in at least one pair of electrodes; measuring the resistance between the two electrodes in each pair of electrodes; and determining the sheet resistance of the to-be-measured thin film based on the measured resistance and the shape of the corresponding to-be-measured thin film.

公开(公告)号：US20150260670A1

公开(公告)日：2015-09-17

申请号：US14470902

申请日：2014-08-27

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Shi Shu ,  Bing Sun ,  Bin Zhang ,  Kexin Lu ,  Yue Shi ,  Zhijun LV

IPC: G01N27/04

CPC classification number: G01N27/041 ,  G01R27/00 ,  G01R27/04

Abstract: The present disclosure relates to a sheet resistance measuring method, comprising the following steps: connecting at least one to-be-measured thin film having a predetermined shape to two separate electrodes in at least one pair of electrodes; measuring the resistance between the two electrodes in each pair of electrodes; and determining the sheet resistance of the to-be-measured thin film based on the measured resistance and the shape of the corresponding to-be-measured thin film.

Abstract translation: 本发明涉及一种薄层电阻测量方法，包括以下步骤：在至少一对电极中将至少一个具有预定形状的被测量薄膜连接到两个分开的电极; 测量每对电极中的两个电极之间的电阻; 以及基于所测量的电阻和相应的待测薄膜的形状来确定待测薄膜的薄层电阻。