公开(公告)号：US10515780B1

公开(公告)日：2019-12-24

申请号：US16225298

申请日：2018-12-19

Applicant: Axcelis Technologies, Inc.

Inventor： Yusef Nouri

IPC: H01J37/317 ,  H01J37/08 ,  H01J37/24 ,  H01J37/302 ,  H01J37/248

Abstract: The present invention is directed to circuits, systems, and methods to quickly to quench an arc that may form between high voltage electrodes associated with an ion source to shorten the duration of the arc and mitigate non-uniform ion implantations. In one example, an arc detection circuit for detecting an arc in an ion implantation system includes an analog-to-digital converter (ADC) and an analysis circuit. The ADC is configured to convert a sensing current indicative of a current being supplied to an electrode in the ion implantation system to a digital current signal that quantifies the sensing current. The analysis circuit is configured to analyze the digital current signal to determine if the digital current signal meets threshold parameter value and in response to the digital current signal meeting the threshold parameter value, provide an arc detection signal to a trigger control circuit that activates an arc quenching mechanism.