公开(公告)号：US09281227B2

公开(公告)日：2016-03-08

申请号：US13930220

申请日：2013-06-28

Applicant: Axcelis Technologies, Inc.

Inventor： William D. Lee ,  Ashwin M. Purohit

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H02N13/00

Abstract: A Johnsen-Rahbek (J-R) electrostatic clamp is provided for clamping a workpiece, wherein the J-R clamp has a dielectric layer having a clamping surface associated with the workpiece and a backside surface generally opposing the clamping surface. The dielectric layer has a plurality of regions, wherein each of the plurality of regions comprises one of a plurality of dielectric materials. Each of the plurality of dielectric materials has a baseline resistivity that is different from the remainder of the plurality of dielectric materials, and each of the plurality of regions of the dielectric layer has a baseline resistivity that is different from the remainder of the plurality of regions of the dielectric layer. A plurality of electrically conductive electrodes are associated with the backside surface of the dielectric layer, wherein each of the plurality of electrically conductive electrodes are associated with one or more of the plurality of regions of the dielectric layer.

Abstract translation: 提供了Johnsen-Rahbek（J-R）静电夹以夹紧工件，其中J-R夹具具有介电层，该电介质层具有与工件相关联的夹紧表面和与夹紧表面大致相对的背面。 电介质层具有多个区域，其中多个区域中的每个区域包括多个介电材料中的一个。 多个介电材料中的每一个具有与多个介电材料的其余部分不同的基线电阻率，并且介电层的多个区域中的每一个具有不同于多个区域的其余部分的基线电阻率 的介电层。 多个导电电极与电介质层的背面相关联，其中多个导电电极中的每一个与电介质层的多个区域中的一个或多个相关联。

公开(公告)号：US20150002983A1

公开(公告)日：2015-01-01

申请号：US13930220

申请日：2013-06-28

Applicant: Axcelis Technologies, Inc.

Inventor： William D. Lee ,  Ashwin M. Purohit

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H02N13/00

Abstract: A Johnsen-Rahbek (J-R) electrostatic clamp is provided for clamping a workpiece, wherein the J-R clamp has a dielectric layer having a clamping surface associated with the workpiece and a backside surface generally opposing the clamping surface. The dielectric layer has a plurality of regions, wherein each of the plurality of regions comprises one of a plurality of dielectric materials. Each of the plurality of dielectric materials has a baseline resistivity that is different from the remainder of the plurality of dielectric materials, and each of the plurality of regions of the dielectric layer has a baseline resistivity that is different from the remainder of the plurality of regions of the dielectric layer. A plurality of electrically conductive electrodes are associated with the backside surface of the dielectric layer, wherein each of the plurality of electrically conductive electrodes are associated with one or more of the plurality of regions of the dielectric layer.

Abstract translation: 提供了Johnsen-Rahbek（J-R）静电夹以夹紧工件，其中J-R夹具具有介电层，该电介质层具有与工件相关联的夹紧表面和与夹紧表面大致相对的背面。 电介质层具有多个区域，其中多个区域中的每个区域包括多个介电材料中的一个。 多个介电材料中的每一个具有与多个介电材料的其余部分不同的基线电阻率，并且介电层的多个区域中的每一个具有不同于多个区域的其余部分的基线电阻率 的介电层。 多个导电电极与电介质层的背面相关联，其中多个导电电极中的每一个与电介质层的多个区域中的一个或多个相关联。