公开(公告)号：US20180151407A1

公开(公告)日：2018-05-31

申请号：US15361813

申请日：2016-11-28

Applicant: Axcelis Technologies, Inc.

Inventor： Stanley W. Stone

IPC: H01L21/687 ,  H05B3/00 ,  H01L21/67

CPC classification number: H01L21/67115 ,  H01L21/67259 ,  H01L21/68728

Abstract: A workpiece clamp has a base with first and second sides with a cam ring rotatably coupled to the first side. The cam ring has plurality of cam slots. An actuator selectively rotates the cam ring with respect to the base. A plurality of rotary clamps, have respective shafts, cam followers assemblies, and workpiece engagement members, where the shaft extends through the base from the first to second side and rotate about an axis. The shaft has individually rotatable first and second members. The cam follower assemblies couple first and second portions of the shaft, where a cam follower is radially offset from the shaft axis and configured to engage a respective cam slot. The workpiece engagement member has a gripper member that is radially offset from the shaft axis and is configured to engage a workpiece based on a position of the cam follower in the respective cam slots. Sensors are positioned on the first side of the base, wherein each sensor detects a rotational position of the first and second members, thus determining a clamping state of each rotary clamp.

公开(公告)号：US10573541B2

公开(公告)日：2020-02-25

申请号：US15361813

申请日：2016-11-28

Applicant: Axcelis Technologies, Inc.

Inventor： Stanley W. Stone

IPC: B25B11/00 ,  H01L21/67 ,  H01L21/687

Abstract: A workpiece clamp has a base with first and second sides with a cam ring rotatably coupled to the first side. The cam ring has plurality of cam slots. An actuator selectively rotates the cam ring with respect to the base. A plurality of rotary clamps, have respective shafts, cam followers assemblies, and workpiece engagement members, where the shaft extends through the base from the first to second side and rotate about an axis. The shaft has individually rotatable first and second members. The cam follower assemblies couple first and second portions of the shaft, where a cam follower is radially offset from the shaft axis and configured to engage a respective cam slot. The workpiece engagement member has a gripper member that is radially offset from the shaft axis and is configured to engage a workpiece based on a position of the cam follower in the respective cam slots. Sensors are positioned on the first side of the base, wherein each sensor detects a rotational position of the first and second members, thus determining a clamping state of each rotary clamp.