公开(公告)号：US20040262542A1

公开(公告)日：2004-12-30

申请号：US10894209

申请日：2004-07-19

Applicant: Axcelis Technologies, Inc.

Inventor： Robert D. Rathmell ,  Victor M. Benveniste

IPC: G21G005/00 ,  G21K005/10

CPC classification number: H01J37/12 ,  H01J37/3171

Abstract: A lens structure for use with an ion beam implanter. The lens structure includes first and second electrodes spaced apart along a direction of ion movement. The lens structure extends across a width of the ion beam for deflecting ions entering the lens structure. The lens structure includes a first electrode for decelerating ions and a second electrode for accelerating the ions. A lens structure mode controller selectively activates either the accelerating or decelerating electrode to to cause ions entering the lens structure to exit said lens structure with a desired trajectory regardless of the trajectory ions enter the lens structure.