公开(公告)号：US10689752B2

公开(公告)日：2020-06-23

申请号：US16192838

申请日：2018-11-16

Applicant: Axcelis Technologies, Inc.

Inventor： David A. Kirkwood ,  Joseph F. Valinski

IPC: C23C14/48 ,  H01J37/00 ,  H01J37/317 ,  H01L21/265

Abstract: An electrically conductive component is provided for a near-wafer environment of an ion implantation system, where the component has a carbon-based substrate having a microscopically textured surface overlying a macroscopically textured surface. The macroscopically textured surface is a mechanically, chemically, or otherwise roughened surface. The microscopically textured surface can be a converted surface formed by a chemical reaction forming a non-stoichiometric silicon and carbon surface. The one or more components can be a dose cup, exit aperture, and tunnel wall. The carbon-based substrate can be graphite. The microscopically textured surface can be a modified graphite surface. No defined interface layer exists between the microscopically textured surface and macroscopically textured surface. The carbon-based graphite is selected based on a final porosity and grain size of the graphite.

公开(公告)号：US20190144991A1

公开(公告)日：2019-05-16

申请号：US16192838

申请日：2018-11-16

Applicant: Axcelis Technologies, Inc.

Inventor： David A. Kirkwood ,  Joseph F. Valinski

IPC: C23C14/48

Abstract: An electrically conductive component is provided for a near-wafer environment of an ion implantation system, where the component has a carbon-based substrate having a microscopically textured surface overlying a macroscopically textured surface. The macroscopically textured surface is a mechanically, chemically, or otherwise roughened surface. The microscopically textured surface can be a converted surface formed by a chemical reaction forming a non-stoichiometric silicon and carbon surface. The one or more components can be a dose cup, exit aperture, and tunnel wall. The carbon-based substrate can be graphite. The microscopically textured surface can be a modified graphite surface. No defined interface layer exists between the microscopically textured surface and macroscopically textured surface. The carbon-based graphite is selected based on a final porosity and grain size of the graphite.