公开(公告)号：US20130205899A1

公开(公告)日：2013-08-15

申请号：US13764780

申请日：2013-02-11

Applicant: Asia Pacific Microsystems, Inc.

Inventor： Chang-Wen Wu ,  Jerwei Hsieh ,  Wu-Chen Yeh ,  Hung-Lin Yin ,  Huai-Wei Hsi

IPC: G01P1/00

CPC classification number: G01P1/00 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/0278 ,  G01P15/0802 ,  G01P15/123

Abstract: A combo transducer includes a base, a proof mass, a membrane unit and a plurality of transducing components. The base is formed with an aperture. The proof mass is disposed in the aperture and has a surface that is formed with a cavity. The membrane unit includes a supporting part connected to the base, a covering part disposed to cover the surface of the proof mass, and a resilient linking part interconnecting the supporting part and the covering part such that the proof mass is movable relative to the base. The transducing components are disposed at the membrane unit. At least one of the transducing components is disposed at the covering part and is registered with the cavity.

Abstract translation: 组合传感器包括基座，检测质量块，膜单元和多个换能元件。 基座形成有孔。 检测体设置在孔中，并具有形成有空腔的表面。 膜单元包括连接到基座的支撑部分，设置成覆盖防弹块表面的覆盖部分和将支撑部分和覆盖部分互连的弹性连接部分，使得证明物质可相对于基部移动。 传感组件设置在膜单元处。 至少一个转换部件设置在覆盖部分并且与空腔配准。