公开(公告)号：US20240201077A1

公开(公告)日：2024-06-20

申请号：US18389316

申请日：2023-11-14

Applicant: Applied Materials, Inc.

Inventor： Nedal SALEH ,  Zhiming JIANG ,  Xiaodong ZHANG ,  Arun Ramaswamy SRIVATSA

IPC: G01N21/31 ,  G01N21/3563

CPC classification number: G01N21/3103 ,  G01N21/3563 ,  G01N2021/3568 ,  G01N2201/126

Abstract: The methods and apparatus provide phase-resolved optical metrology for determining qualities of a substrate and films thereon. Transmitted and reflected signals are coupled using both amplitude and phase information to improve the metrology information obtained from film layers on the substrate.