公开(公告)号：US12050327B2

公开(公告)日：2024-07-30

申请号：US16537326

申请日：2019-08-09

Applicant: Applied Materials, Inc.

Inventor： Jinxin Fu ,  Tapashree Roy ,  Ludovic Godet ,  Wayne McMillan ,  Robert J Visser

IPC: G02B3/00 ,  G02B27/01

CPC classification number: G02B3/0068 ,  G02B3/0012 ,  G02B27/0172

Abstract: An imaging system and a method of manufacturing a metalens array is provided. The imaging system includes a metalens array, and light scattered from an object is split by the metalens array, such that an image is formed in front of an observer. The metalens array is at least partially transparent to visible light, so that the observer can also see the environment. The method of manufacturing the metalens array includes bonding together a plurality of substrates, and dicing the plurality of substrates into metalens arrays. The metalens arrays can be used in the imaging system.