公开(公告)号：US20150252477A1

公开(公告)日：2015-09-10

申请号：US14616206

申请日：2015-02-06

Applicant: Applied Materials, Inc.

Inventor： Victor NGUYEN ,  Mihaela BALSEANU ,  Ning LI ,  Steven D. MARCUS ,  Mark SALY ,  David THOMPSON ,  Li-Qun XIA

IPC: C23C16/455 ,  C23C16/458 ,  C23C16/34 ,  C23C16/24 ,  C23C16/50

CPC classification number: C23C16/45525 ,  C23C16/24 ,  C23C16/30 ,  C23C16/345 ,  C23C16/347 ,  C23C16/36 ,  C23C16/45531 ,  C23C16/45542 ,  C23C16/45551 ,  C23C16/458 ,  C23C16/50

Abstract: Embodiments disclosed herein generally relate to the processing of substrates, and more particularly, relate to methods for forming a dielectric film. In one embodiment, the method includes placing a plurality of substrates inside a processing chamber and performing a sequence of exposing the substrates to a first reactive gas comprising silicon, and then exposing the substrates to a plasma of a second reactive gas comprising nitrogen and at least one of oxygen or carbon, and repeating the sequence to form the dielectric film comprising silicon carbon nitride or silicon carbon oxynitride on each of the substrates.

Abstract translation: 本文公开的实施方案通常涉及衬底的处理，更具体地涉及形成电介质膜的方法。 在一个实施例中，该方法包括将多个基板放置在处理室内并执行将基板暴露于包含硅的第一反应气体的顺序，然后将基板暴露于包含氮气的至少第二反应气体的等离子体 一个氧或碳，并且重复该顺序以在每个基板上形成包含氮化碳或氮氧化硅的电介质膜。

公开(公告)号：US20230313380A1

公开(公告)日：2023-10-05

申请号：US18200497

申请日：2023-05-22

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Kenichi OHNO ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  David A. BRITZ ,  Pravin K. NARWANKAR ,  Thomas KNISLEY ,  Mark SALY ,  Jeffrey ANTHIS

IPC: C23C16/56 ,  C22C19/03 ,  C23C16/40

CPC classification number: C23C16/56 ,  C22C19/03 ,  C23C16/405

Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component has a body containing a nickel superalloy, a metal oxide template layer disposed on the body, and an aluminum oxide layer disposed between the body of the aerospace component and the metal oxide template layer. The metal oxide template layer contains chromium oxide, chromium oxide hydroxide, or a combination thereof. The aluminum oxide layer contains α-Al2O3. The metal oxide template layer and the aluminum oxide layer have a corundum crystal structure and have crystal structures with a lattice mismatch of about 0.1% to about 10%.

公开(公告)号：US20220298920A1

公开(公告)日：2022-09-22

申请号：US17832568

申请日：2022-06-03

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28

Abstract: Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.

公开(公告)号：US20190284694A1

公开(公告)日：2019-09-19

申请号：US16356700

申请日：2019-03-18

Applicant: Applied Materials, Inc.

Inventor： Thomas KNISLEY ,  Mark SALY ,  David Alexander BRITZ ,  David THOMPSON

IPC: C23C16/455 ,  C23C16/34 ,  C23C16/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a protective coating on an aerospace component includes sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.

公开(公告)号：US20230184119A1

公开(公告)日：2023-06-15

申请号：US18106859

申请日：2023-02-07

Applicant: Applied Materials, Inc.

Inventor： Thomas KNISLEY ,  Mark SALY ,  David Alexander BRITZ ,  David THOMPSON

IPC: F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28

CPC classification number: F01D5/288 ,  C23C16/45553 ,  C23C16/45555 ,  C23C16/34 ,  C23C16/405 ,  C23C16/45529 ,  C23C16/30 ,  C23C16/56 ,  F01D5/286 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28 ,  C07F11/005

Abstract: Protected aerospace components are provided and contain a nanolaminate film stack disposed on a surface of an aerospace component, where the nanolaminate film stack comprises alternating layers of a chromium-containing layer and a second deposited layer. The chromium-containing layer can include metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.

公开(公告)号：US20200240018A1

公开(公告)日：2020-07-30

申请号：US16843358

申请日：2020-04-08

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D5/28 ,  F01D9/02 ,  F01D25/12 ,  F01D25/14 ,  F01D25/28 ,  F23R3/28

Abstract: Protective coatings on an aerospace component are provided. An aerospace component includes a surface containing nickel, nickel superalloy, aluminum, chromium, iron, titanium, hafnium, alloys thereof, or any combination thereof, and a coating disposed on the surface, where the coating contains a nanolaminate film stack having two or more pairs of a first deposited layer and a second deposited layer. The first deposited layer contains chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof, the second deposited layer contains aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof, and the first deposited layer and the second deposited layer have different compositions from each other.

公开(公告)号：US20210292901A1

公开(公告)日：2021-09-23

申请号：US17331473

申请日：2021-05-26

Applicant: Applied Materials, Inc.

Inventor： Thomas KNISLEY ,  Mark SALY ,  David Alexander BRITZ ,  David THOMPSON

IPC: C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D5/28 ,  F01D9/02 ,  F01D25/12 ,  F01D25/14 ,  F01D25/28 ,  F23R3/28

Abstract: Methods for depositing protective coatings on aerospace components are provided and include sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface of the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.

公开(公告)号：US20190284686A1

公开(公告)日：2019-09-19

申请号：US16356688

申请日：2019-03-18

Applicant: Applied Materials, Inc.

Inventor： Yuriy MELNIK ,  Sukti CHATTERJEE ,  Kaushal GANGAKHEDKAR ,  Jonathan FRANKEL ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR ,  David Alexander BRITZ ,  Thomas KNISLEY ,  Mark SALY ,  David THOMPSON

IPC: C23C16/30 ,  C23C16/455 ,  C23C16/56 ,  F01D5/28 ,  F01D9/02 ,  F01D25/12 ,  F01D25/14 ,  F01D25/28 ,  F23R3/28

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a chemical vapor deposition (CVD) process or a first atomic layer deposition (ALD) process and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second ALD process, where the first deposited layer and the second deposited layer have different compositions from each other.