公开(公告)号：US20230272855A1

公开(公告)日：2023-08-31

申请号：US17851150

申请日：2022-06-28

Applicant: Applied Materials, Inc.

Inventor： Yao-Hung YANG ,  Fred Eric RUHLAND ,  Chih-Yang CHANG ,  Chiache LIN ,  Saurabh Murlidhar CHAUDHARI ,  Sridhar KENCHANAPURA NAGARAJU ,  Kishan RAO

IPC: F16J15/02

CPC classification number: F16J15/022

Abstract: An apparatus for inserting a seal member into a seal groove includes a tray. The tray includes a holding groove formed in a front surface for containing the seal member. The holding groove is sized and shaped to correspond with the seal groove. A method of installing a seal member into a seal groove includes aligning the holding groove with the seal groove, and applying a pressure to a back surface of the tray, thereby deforming the tray and inserting the seal member into the seal groove.