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公开(公告)号：US11274377B2
公开(公告)日：2022-03-15
申请号：US16386456
申请日：2019-04-17
发明人： Kyle M. Hanson , Manjunatha Vishwanatha Adagoor , Karthikeyan Balaraman , Karthick Vasu , Shailesh Chouriya
摘要： Electroplating system seals may include an annular busbar characterized by an inner annular radius and an outer annular radius. The annular busbar may include a plurality of contact extensions. The seals may include an external seal member characterized by an inner annular radius and an outer annular radius. The external seal member may be vertically aligned with and extend inward of the contact extensions at the inner annular radius of the external seal member. The external seal member may include an interior surface at least partially facing the contact extensions. The seals may also include an internal seal member extending a first distance along the interior surface of the external seal member from the inner annular radius. The internal seal member may include a deformable material configured to support a substrate between the internal seal member and the plurality of contact extensions.
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公开(公告)号：US20190323141A1
公开(公告)日：2019-10-24
申请号：US16386456
申请日：2019-04-17
发明人： Kyle M. Hanson , Manjunatha Vishwanatha Adagoor , Karthikeyan Balaraman , Karthick Vasu , Shailesh Chouriya
摘要： Electroplating system seals may include an annular busbar characterized by an inner annular radius and an outer annular radius. The annular busbar may include a plurality of contact extensions. The seals may include an external seal member characterized by an inner annular radius and an outer annular radius. The external seal member may be vertically aligned with and extend inward of the contact extensions at the inner annular radius of the external seal member. The external seal member may include an interior surface at least partially facing the contact extensions. The seals may also include an internal seal member extending a first distance along the interior surface of the external seal member from the inner annular radius. The internal seal member may include a deformable material configured to support a substrate between the internal seal member and the plurality of contact extensions.
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