公开(公告)号：US20020138321A1

公开(公告)日：2002-09-26

申请号：US09811667

申请日：2001-03-20

Applicant: Applied Materials, Inc.

Inventor： Huey-Shin Yuan ,  John F. Arackaparambil ,  Venu Narra ,  Prakash M. Kulkarni

IPC: G06F017/60

CPC classification number: G06Q10/10 ,  G06Q50/188

Abstract: An automated workflow system, method and medium for implementation of manufacturing activities in a manufacturing facility are described. At least some embodiments of the present invention include a workflow software component that is configured to execute a number of tasks to be performed automatically and configured to retry a predetermined number of times when one of the plurality of tasks fails to be executed.

Abstract translation: 描述了用于在制造设施中实现制造活动的自动化工作流系统，方法和介质。 本发明的至少一些实施例包括工作流程软件组件，其被配置为执行自动执行的若干任务并且被配置为在多个任务中的一个不能执行时重试预定次数。

公开(公告)号：US20020156548A1

公开(公告)日：2002-10-24

申请号：US10084092

申请日：2002-02-28

Applicant: Applied Materials, Inc.

Inventor： John F. Arackaparambil ,  Tom Chi ,  Billy Chow ,  Patrick M. D'Souza ,  Parris Hawkins ,  Charles Huang ,  Jett Jensen ,  Badri N. Krishnamurthy ,  Pradeep M. Kulkarni ,  Prakash M. Kulkarni ,  Wen Fong Lin ,  Shantha Mohan ,  Bishnu Nandy ,  Huey-Shin Yuan

IPC: G06F155/00 ,  G06F019/00

CPC classification number: G05B19/41845 ,  G05B2219/31018 ,  G05B2219/31202 ,  G05B2219/45026 ,  Y02P90/20 ,  Y02P90/24 ,  Y02P90/26 ,  Y02P90/86

Abstract: The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

Abstract translation: 本发明提供了一种新颖的分布式工厂系统框架，其包括具有SW开发和集成（210），安装和管理（220），工厂建模（230），制造计划（240）， 制造控制，监控和跟踪（250）和制造结果分析（260）。 工厂生命周期包括框架组件。 分布式工厂系统框架还包括应用程序组件和构建块。 框架组件适于用于管理应用组件，同时使用应用组件来提供用于管理诸如晶圆厂的过程的指令。 构建块适用于形成或修改框架和应用程序组件。 分布式工厂系统框架提供计算机实现的整合处理系统的方法，并促进过程和设备更改。