公开(公告)号：US20240368756A1

公开(公告)日：2024-11-07

申请号：US18744079

申请日：2024-06-14

Applicant: Applied Materials, Inc.

Inventor： Yuxing ZHANG ,  Tuan Anh (Mike) NGUYEN ,  Amit Kumar BANSAL ,  Nitin PATHAK ,  Saket RATHI ,  Thomas RUBIO ,  Udit Suryakant KOTAGI ,  Badri N. RAMAMURTHI ,  Dharma Ratnam SRICHURNAM

IPC: C23C16/44 ,  C23C16/455

Abstract: The present disclosure relates to cleaning assemblies, components thereof, and methods associated therewith for substrate processing chambers. In one example, a method includes positioning a pedestal disposed in a substrate processing chamber in a first vertical position for a first time period, directing cleaning fluid into the internal volume of the substrate processing chamber located above the faceplate, diverting a portion of the cleaning fluid to the distribution ring and into the internal volume located below the faceplate by opening up the isolation valve, and positioning the pedestal in one or more additional vertical positions while the isolation valve is opened, the one or more additional vertical positions being different than the first vertical position.