公开(公告)号：US20250035215A1

公开(公告)日：2025-01-30

申请号：US18225673

申请日：2023-07-24

Applicant: Applied Materials, Inc.

Inventor： Chetan Ramachandra NAIK ,  Anand KUMAR

IPC: F16K1/36 ,  F16K1/42 ,  F16K27/02

Abstract: Embodiments of symmetric flow valves for use in substrate processing chambers are provided herein. In some embodiments, a symmetric flow valve includes: a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes a plurality of axisymmetrically disposed openings arranged in a non-linear manner, and wherein the bottom plate includes a port opening; an actuator disposed above the top plate and coupled to a central region of the top plate radially inward of the plurality of axisymmetrically disposed openings; and a poppet disposed in the interior volume and coupled to the actuator to move the poppet vertically within the interior volume, wherein the poppet is configured to selectively seal the plurality of axisymmetrically disposed openings or the port opening.