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公开(公告)号：US20220005713A1
公开(公告)日：2022-01-06
申请号：US16921741
申请日：2020-07-06
发明人： Xuesong Lu , Yu Lei , Anup Phatak , Hyman Lam , Chong Jiang , Malcolm Emil Delaney , Yufei Hu
摘要： A method includes receiving a plurality of sets of sensor data associated with a processing chamber of a substrate processing system. Each of the plurality of sets of sensor data comprises a corresponding sensor value of the processing chamber mapped to a corresponding spacing value of the processing chamber. The method further includes providing the plurality of sets of sensor data as input to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, one or more outputs indicative of a health of the processing chamber. The method further includes causing, based on the one or more outputs, performance of one or more corrective actions associated with the processing chamber.
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公开(公告)号：US11749543B2
公开(公告)日：2023-09-05
申请号：US16921741
申请日：2020-07-06
发明人： Xuesong Lu , Yu Lei , Anup Phatak , Hyman W. H. Lam , Chong Jiang , Malcolm Emil Delaney , Yufei Hu
CPC分类号： H01L21/67253 , G06N3/08 , H05B1/0233
摘要： A method includes receiving a plurality of sets of sensor data associated with a processing chamber of a substrate processing system. Each of the plurality of sets of sensor data comprises a corresponding sensor value of the processing chamber mapped to a corresponding spacing value of the processing chamber. The method further includes providing the plurality of sets of sensor data as input to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, one or more outputs indicative of a health of the processing chamber. The method further includes causing, based on the one or more outputs, performance of one or more corrective actions associated with the processing chamber.
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