公开(公告)号：US20240071729A1

公开(公告)日：2024-02-29

申请号：US17896075

申请日：2022-08-26

Applicant: Applied Materials, Inc.

Inventor： Kumaresan NAGARAJAN ,  Yue GUO ,  Vijay SINGH ,  Adarsh BALAREDDY

IPC: H01J37/32 ,  H01B5/00

CPC classification number: H01J37/32577 ,  H01B5/00 ,  H01J37/32082 ,  H01R4/4881

Abstract: Embodiments of radio frequency (RF) power connection rods are provided herein. In some embodiments, an RF power connection rod includes a first connection rod having a first connection end, a first socket end opposite the first connection end, and a first hollow portion extending from the first connection end to the first socket end; a second connection rod having a second connection end, a second socket end opposite the second connection end, and a second hollow portion extending from the second connection end to the second socket end, wherein the second connection end is adjustably coupled to the first connection end along an axial direction of the second connection rod, and wherein a gas flow path extends from one or more gas inlets of the first connection rod, through the first hollow portion to the second hollow portion, to one or more gas outlets disposed through the second connection rod; a first plug coupled to the first socket end; and a second plug coupled to the second socket end.

公开(公告)号：US20240013987A1

公开(公告)日：2024-01-11

申请号：US17861792

申请日：2022-07-11

Applicant: Applied Materials, Inc.

Inventor： Vijay SINGH ,  Kumaresan NAGARAJAN ,  Adarsh BALAREDDY

IPC: H01H9/02

CPC classification number: H01H9/0271

Abstract: In embodiments, systems and apparatus comprise a bracket having a through hole configured to receive a first connector connected to a panel spaced from the bracket, the bracket movable between first and second positions; a switch mountable on the panel, the switch having first and second switch positions; and at least one compression spring extending from the bracket to bias the bracket into the first position spaced away from the switch. When the bracket is in the first position, the switch is in the first switch position, and when the bracket is in the second position, the bracket engages and actuates the switch into the second switch position. The bracket is movable into the second position to engage and actuate the switch by coupling a second connector to the first connector. The switch is configured to trigger a signal indicating that the first connector is connected to the second connector.