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公开(公告)号:US20170082781A1
公开(公告)日:2017-03-23
申请号:US15275140
申请日:2016-09-23
Applicant: Apple Inc.
Inventor: Que Anh S. NGUYEN , Matthew S. ROGERS
CPC classification number: G02B1/115 , C03C17/3452 , G02B1/12 , G02B1/14
Abstract: Methods and systems for depositing a thin film are disclosed. The methods and systems can be used to deposit a film having a uniform thickness on a substrate surface that has a non-planar three-dimensional geometry, such as a curved surface. The methods involve the use of a deposition source that has a shape in accordance with the non-planar three-dimensional geometry of the substrate surface. In some embodiments, multiple layers of films are deposited onto each other forming multi-layered coatings. In some embodiments, the multi-layered coatings are antireflective (AR) coatings for windows or lenses.