CHEMICAL SENSOR AND METHOD OF FORMING THE SAME

    公开(公告)号:US20200278289A1

    公开(公告)日:2020-09-03

    申请号:US16649448

    申请日:2018-10-08

    Abstract: Various embodiments may relate a chemical sensor. The chemical sensor may include a substrate including a first sealed (or isolated) cavity and a second sealed (or isolated) cavity separate from the first sealed (or isolated) cavity. The chemical sensor may also include an emitter in the first sealed (or isolated) cavity, the emitter configured to emit infrared light. The chemical sensor may further include a detector in the second sealed (or isolated) cavity. The chemical sensor may also include a waveguide configured to carry the infrared light from the emitter to the detector. The waveguide may include a sensing portion configured such that a property of the infrared light carried through the sensing portion changes in response to a chemical entity in contact with the sensing portion. The detector may be configured to detect the change in the property (of the infrared light).

    Optical gyroscope, electro-optic system, and methods of forming the same

    公开(公告)号:US10578438B2

    公开(公告)日:2020-03-03

    申请号:US16076563

    申请日:2017-01-24

    Abstract: Various embodiments may provide an optical gyroscope. The optical gyroscope may include a ring resonator, an input source configured to generate or provide a first light beam and a second light beam to the ring resonator, and a switching pathway having an input end and an output end coupled to the ring resonator, and may include a plurality of switches. The optical gyroscope may include a control circuit configured to control the plurality of switches to allow the first light beam to propagate from the input end to the output end along the switching pathway during a first time interval, and allow the second light beam to propagate from the input end to the output end along the switching pathway during a second time interval. The optical gyroscope may additionally include a detector loop configured to receive the first light beam and the second light beam from the ring resonator.

    Bolometer, method of fabricating the same, and bolometric method

    公开(公告)号:US10151638B2

    公开(公告)日:2018-12-11

    申请号:US15761082

    申请日:2016-08-12

    Abstract: Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may further include a first waveguide over the substrate and coupled to the ring resonator structure, the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer. The bolometer may additionally include a second waveguide over the substrate and coupled to the ring resonator structure, the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase.

    Chemical sensor and method of forming the same

    公开(公告)号:US11486820B2

    公开(公告)日:2022-11-01

    申请号:US16649448

    申请日:2018-10-08

    Abstract: Various embodiments may relate a chemical sensor. The chemical sensor may include a substrate including a first sealed (or isolated) cavity and a second sealed (or isolated) cavity separate from the first sealed (or isolated) cavity. The chemical sensor may also include an emitter in the first sealed (or isolated) cavity, the emitter configured to emit infrared light. The chemical sensor may further include a detector in the second sealed (or isolated) cavity. The chemical sensor may also include a waveguide configured to carry the infrared light from the emitter to the detector. The waveguide may include a sensing portion configured such that a property of the infrared light carried through the sensing portion changes in response to a chemical entity in contact with the sensing portion. The detector may be configured to detect the change in the property (of the infrared light).

    GYROSCOPE, METHODS OF FORMING AND OPERATING THE SAME

    公开(公告)号:US20200173780A1

    公开(公告)日:2020-06-04

    申请号:US16638082

    申请日:2018-08-16

    Abstract: Various embodiments may provide a gyroscope. The gyroscope may include a piezoelectric substrate, an excitation transducer configured to generate a surface acoustic wave, and a sensing transducer configured to receive the surface acoustic wave generated by the excitation transducer. The gyroscope may additionally include a mass dot array between the excitation transducer and the sensing transducer, the mass dot array configured to generate a stress on the piezoelectric substrate based on a rotation of said gyroscope upon the surface acoustic wave passing through the mass dot array. The gyroscope may also include a light source, and an optical detector configured to receive one or more light beams generated by the light source to determine the rotation of the gyroscope based on a property of the one or more light beams. The property of the one or more light beams may be variable based on the stress on the piezoelectric substrate.

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