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公开(公告)号:US12111114B2
公开(公告)日:2024-10-08
申请号:US17163217
申请日:2021-01-29
发明人: Hung-Hsien Huang , Shin-Luh Tarng , Ian Hu , Chien-Neng Liao , Jui-Cheng Yu , Po-Cheng Huang
CPC分类号: F28D15/046 , F28D15/0233 , F28D15/0283 , F28F13/187 , F28F2255/18
摘要: A heat transfer element, a method for manufacturing the same and a semiconductor structure including the same are provided. The heat transfer element includes a housing, a chamber, a dendritic layer and a working fluid. The chamber is defined by the housing. The dendritic layer is disposed on an inner surface of the housing. The working fluid is located within the chamber.