公开(公告)号：US20190172674A1

公开(公告)日：2019-06-06

申请号：US16324518

申请日：2017-07-31

Applicant: ASML Netherlands B.V.

Inventor： Juying DOU ,  Zhang Fan ,  Tzu-Yi Kuo ,  Zhong-wei Chen

IPC: H01J37/073 ,  H01J9/04 ,  H01J37/065

Abstract: Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.