公开(公告)号：US20240319123A1

公开(公告)日：2024-09-26

申请号：US18691828

申请日：2022-08-16

Applicant: ASML Netherlands B.V.

Inventor： Achim WOESSNER ,  Younghoon SONG ,  Pioter NIKOLSKI ,  Yun A SUNG ,  Antonio CORRADI ,  Hermanus Adrianus DILLEN

IPC: G01N23/2251

CPC classification number: G01N23/2251 ,  G01N2223/304 ,  G01N2223/306 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/6116 ,  G01N2223/646

Abstract: Apparatuses, systems, and methods for providing beams for classifying and identifying failure mechanisms associated with a sample of charged particle beam systems. In some embodiments, a method may include analyzing a first plurality of voltage contrast images of a sample to identify a plurality of defects; and analyzing a pattern of a subset of the plurality of defects to determine a failure mechanism for the subset of the plurality of defects.