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公开(公告)号：US20220299751A1
公开(公告)日：2022-09-22
申请号：US17633882
申请日：2020-07-27
Applicant: ASML Netherlands B.V.
Inventor： Arie Jeffrey DEN BOEF , Simon HUISMAN
Abstract: Disclosed is a phase modulator apparatus comprises at least a first phase modulator for modulating input radiation, and a metrology device comprising such a phase modulator apparatus. The first phase modulator comprises a first moving grating in at least an operational state for diffracting the input radiation and Doppler shifting the frequency of the diffracted radiation; and a first compensatory grating element comprising a pitch configured to compensate for wavelength dependent dispersion of at least one diffraction order of said diffracted radiation.
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