公开(公告)号：US11756182B2

公开(公告)日：2023-09-12

申请号：US16508167

申请日：2019-07-10

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Zhaohui Guo ,  Ruoyu Zhu ,  Chuan Li

IPC: G06T7/00 ,  G06F18/24

CPC classification number: G06T7/001 ,  G06F18/24 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: A pattern grouping method may include receiving an image of a first pattern, generating a first fixed-dimensional feature vector using trained model parameters applying to the received image, and assigning the first fixed-dimensional feature vector a first bucket ID. The method may further include creating a new bucket ID for the first fixed-dimensional feature vector in response to determining that the first pattern does not belong to one of a plurality of buckets corresponding to defect patterns, or mapping the first fixed-dimensional feature vector to the first bucket ID in response to determining that the first pattern belongs to one of a plurality of buckets corresponding to defect patterns.