公开(公告)号：US11764030B2

公开(公告)日：2023-09-19

申请号：US16714549

申请日：2019-12-13

Applicant: ASML Netherlands B.V.

Inventor： Johannes Hubertus Antonius Van De Rijdt ,  Peter Paul Hempenius ,  Allard Eelco Kooiker ,  Jef Goossens ,  Petrus Wilhelmus Vleeshouwers

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2007

Abstract: Disclosed is a stage apparatus comprising: an object support configured to support an object; a positioning device configured to position the object support; a first connection arrangement configured to connect the object support to the positioning device, the first connection arrangement comprising at least one damped connection; and a second connection arrangement configured to connect the object support to the positioning device, the second connection arrangement comprising at least one substantially rigid connection.