公开(公告)号：US20200176215A1

公开(公告)日：2020-06-04

申请号：US16698677

申请日：2019-11-27

Applicant: ASML Netherlands B.V.

Inventor： Jeroen Gosen ,  Sven Antoin Johan Hol ,  Martijn Petrus Christianus Van Heumen ,  Dennis Herman Caspar Van Banning ,  Naseh Hosseini

IPC: H01J37/141

Abstract: Systems and methods for cooling an objective lens of a charged-particle beam system are disclosed. According to certain embodiments, the method for cooling an objective lens of a charged-particle beam system comprises receiving a fluid via a fluid input port of a bobbin, circulating the fluid that absorbs heat generated by a plurality of electromagnetic coils of the objective lens, via a plurality of channels distributed in the bobbin, and dispensing the fluid circulated by the plurality of channels via a fluid output port of the bobbin. The bobbin may further comprise a bottom flange proximal to a wafer and a top flange distal from the wafer. The bobbin having the plurality of channels may comprise an additively manufactured monolithic structure.

公开(公告)号：US11764027B2

公开(公告)日：2023-09-19

申请号：US16698677

申请日：2019-11-27

Applicant: ASML Netherlands B.V.

Inventor： Jeroen Gerard Gosen ,  Sven Antoin Johan Hol ,  Martijn Petrus Christianus Van Heumen ,  Dennis Herman Caspar Van Banning ,  Naseh Hosseini

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J2237/002

Abstract: Systems and methods for cooling an objective lens of a charged-particle beam system are disclosed. According to certain embodiments, the method for cooling an objective lens of a charged-particle beam system comprises receiving a fluid via a fluid input port of a bobbin, circulating the fluid that absorbs heat generated by a plurality of electromagnetic coils of the objective lens, via a plurality of channels distributed in the bobbin, and dispensing the fluid circulated by the plurality of channels via a fluid output port of the bobbin. The bobbin may further comprise a bottom flange proximal to a wafer and a top flange distal from the wafer. The bobbin having the plurality of channels may comprise an additively manufactured monolithic structure.