公开(公告)号：US20150055106A1

公开(公告)日：2015-02-26

申请号：US14377586

申请日：2013-01-03

Applicant: ASML Netherlands B.V.

Inventor： Johan Frederik Dijksman ,  Johannes Hultermans ,  Antonius Theodorus Wilhelmus Kempen ,  Ramin Badie

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70033 ,  G03F7/70908 ,  G03F7/70916 ,  H05G2/005

Abstract: The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardly whereby gravity assists in the establishment of the stream. The droplets are monitored using a visualization system and once the stream is determined to have the desired characteristics the stream generator is moved to a second position of steady state use in which the droplet stream is emitted in a horizontal direction.

Abstract translation: 本发明提供了一种便于启动燃料液滴流发生器的方法和装置。 在起动阶段期间，燃料液滴流发生器被定位成使得燃料液滴向下发射，由此重力有助于流的建立。 使用可视化系统监测液滴，并且一旦流被确定为具有期望的特性，则流发生器被移动到液晶流在水平方向上发射的稳态使用的第二位置。