公开(公告)号：US20240212317A1

公开(公告)日：2024-06-27

申请号：US18557578

申请日：2022-04-28

Applicant: ASML Netherlands B.V.

Inventor： Jingchun WANG ,  Chuang YE ,  Shengcheng JIN

IPC: G06V10/762 ,  G06T5/10 ,  G06T7/00 ,  G06T7/11 ,  G06V10/44 ,  G06V10/74

CPC classification number: G06V10/762 ,  G06T5/10 ,  G06T7/0004 ,  G06T7/11 ,  G06V10/44 ,  G06V10/761 ,  G06T2207/30148

Abstract: Apparatuses, systems, and methods for grouping a plurality of patterns extracted from image data are disclosed. In some embodiments, the method for grouping the patterns comprises receiving the image data including the plurality of patterns that represent features to be formed on a portion of a wafer. The method also comprises separating the plurality of patterns after Fourier Transform into multiple sets of patterns. The method further comprises performing, to a respective set of patterns, a hierarchical clustering to obtain a plurality of subsets of patterns by recursively evaluating features related to similarity between patterns within the respective set of patterns.