公开(公告)号：US10588211B2

公开(公告)日：2020-03-10

申请号：US15035983

申请日：2014-10-23

Applicant: ASML Netherlands B.V.

Inventor： Rolf Theodorus Nicolaas Beijsens ,  Kornelis Frits Feenstra ,  Arjen Teake De Jong ,  Reinier Theodorus Martinus Jilisen ,  Niek Antonius Jacobus Maria Kleemans ,  Andrey Nikipelov ,  Pavel Seroglazov ,  Nicolaas Antonius Allegondus Johannes Van Asten ,  Harald Ernest Verbraak

IPC: H05G2/00

Abstract: A radiation system to generate a radiation emitting plasma, the radiation system include a fuel emitter to provide a fuel target at a plasma formation region, a first laser arranged to provide a first laser beam at the plasma formation region incident on the fuel target to generate a radiation emitting plasma, an imaging device arranged to obtain a first image of the radiation emitting plasma at the plasma formation region, the first image indicating at least one image property of the radiation emitting plasma, and a controller. The controller is arranged to receive the first image, and to generate at least one instruction based on the at least one image property of the radiation emitting plasma to modify operation of at least one component of the radiation system to reduce a detrimental effect of debris.