公开(公告)号：US20230017894A1

公开(公告)日：2023-01-19

申请号：US17952129

申请日：2022-09-23

Applicant: ASML Netherlands B.V.

Inventor： Jurgen VAN SOEST ,  Gun Sara Mari BERGLUND ,  Robert Wong Joek Meu HUANG FOEN CHUNG ,  Diego MARTINEZ NEGRETE GASQUE ,  Laura DINU GURTLER

IPC: H01J37/317 ,  H01J37/12 ,  H01J37/063

Abstract: A flood column for charged particle flooding of a sample, the flood column comprising a charged particle source configured to emit a charged particle beam along a beam path; a source lens arranged down-beam of the charged particle source; a condenser lens arranged down-beam of the source lens; and an aperture body arranged down-beam of the condenser lens, wherein the aperture body is for passing a portion of the charged particle beam; and wherein the source lens is controllable so as to variably set the beam angle of the charged particle beam down-beam of the source lens.