公开(公告)号：US11835106B2

公开(公告)日：2023-12-05

申请号：US16772406

申请日：2018-11-15

Applicant: ASML Netherlands B.V.

Inventor： Derk Ten Hoopen ,  Francois-Xavier Debiesme ,  Eric Pierre-Yves Vennat

IPC: G03F7/20 ,  F16F9/30 ,  F16F9/32 ,  G03F7/00

CPC classification number: F16F9/306 ,  F16F9/3207 ,  G03F7/70808

Abstract: The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.