公开(公告)号：US20200174428A1

公开(公告)日：2020-06-04

申请号：US16615632

申请日：2018-04-23

Applicant: ASML Netherlands B.V.

Inventor： Marcel François HEERTJES ,  Daniel DEENEN ,  Natalia IRIGOYEN PERDIGUERO ,  Yannick KNOPS

IPC: G05B13/02 ,  G05B19/4155

Abstract: The invention relates to a control system comprising a controller arranged to provide an output signal on the basis of an input signal. The controller comprises a linear integrator, a linear gain and a selector. The linear integrator is arranged to provide a first control signal. The linear gain is in parallel to the linear integrator and is arranged to provide a second control signal. The selector is arranged to switch between an integrator mode in which the first control signal is used as the output signal of the controller and a gain mode in which the second control signal is used as the output signal of the controller. The selector is arranged to switch to the integrator mode when the value of the second control signal passes zero, and to switch to the gain mode when: eu