公开(公告)号：US10545414B2

公开(公告)日：2020-01-28

申请号：US15767524

申请日：2016-10-26

Applicant: ASML Netherlands B.V.

Inventor： Alexander Petrus Josephus Van Lankvelt ,  Ingmar August Kerp ,  Richardus Simon Antonius Oostveen ,  Marco Hendrikus Hermanus Oude Nijhuis ,  Robertus Mathijs Gerardus Rijs ,  Olav Johannes Seijger ,  Alexander Maurice Steenhoek

IPC: G03B27/42 ,  B64C17/06 ,  G03F7/20 ,  F16F15/02 ,  F16J15/52

Abstract: The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.